| 基于LIGA技术的微细电火花加工优化研究 |
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| 引用本文： | 邹丽芸,张院春,彭良强,黄军容,伊福廷,张菊芳,韩勇.基于LIGA技术的微细电火花加工优化研究[J].电加工与模具,2004(Z1):39-41. |
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| 作者姓名： | 邹丽芸 张院春 彭良强 黄军容 伊福廷 张菊芳 韩勇 |
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| 作者单位： | 1. 北京市机电院高技术股份有限公司,北京,100002
2. 中国科学院高能物理研究所,北京,100039 |
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| 基金项目： | 北京市自然科学基金，国家高技术研究发展计划(863计划)，3022005，2002AA431150,2003AA404040，， |
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| 摘 要： | 比较了活动掩膜法与固定掩膜法得到的PMMA胶结构,实验表明固定掩膜法更适合于多次曝光.结合LIGA技术和微细电火花加工的优点,用LIGA技术制备出具有复杂形状的铜微细工具电极,再用该工具电极进行微细电火花加工,在不锈钢上加工出异形微细孔.并通过进一步调整电火花加工工艺参数,优化了加工尺寸精度和表面粗糙度.
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| 关 键 词： | 微细加工 LIGA技术 电火花加工 |
| 修稿时间： | 2003年11月27 |
Optimal process of micro-EDM based on LIGA technique |
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| Zou Liyun,et al..Optimal process of micro-EDM based on LIGA technique[J].Electromachining & Mould,2004(Z1):39-41. |
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| Authors: | Zou Liyun |
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| Abstract: | It is shown in this paper by the comparing experiments that the method with fixing mask is more suitable for multi-lithography than the removable mask. It has been studied that the fabrication of copper microelectrode with complicated shape by LIGA process and the machining of stainless steel workpiece by EDM process with this microelectrode, which combines the excellences of LIGA and EDM. The optimization parameters of EDM process have been obtained, by which the dimension precision and the surface quality can be controlled better. |
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| Keywords: | micromachining LIGA EDM |
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