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飞机座舱有机玻璃与ITO薄膜附着力优化
引用本文:李玉杰,陈东林,李玉琴,王长伟,周留成.飞机座舱有机玻璃与ITO薄膜附着力优化[J].塑性工程学报,2012,19(1):113-117.
作者姓名:李玉杰  陈东林  李玉琴  王长伟  周留成
作者单位:空军工程大学工程学院,西安,710038
摘    要:针对飞机座舱有机玻璃与ITO薄膜附着力差这一现象,提出了在磁控溅射法镀ITO薄膜前,先对有机玻璃基体进行低温等离子体表面轰击、预镀SiO2过渡层的改进方法。试验结果表明,改进工艺条件下制得的薄膜与基体的附着力得到了显著增强,且光电性能满足应用要求。

关 键 词:有机玻璃  ITO薄膜  附着力  优化

Optimization of adhesion force between ITO films and PMMA used in airplane canopy
LI Yu-jie , CHEN Dong-lin , LI Yu-qin , WANG Chang-wei , ZHOU Liu-cheng.Optimization of adhesion force between ITO films and PMMA used in airplane canopy[J].Journal of Plasticity Engineering,2012,19(1):113-117.
Authors:LI Yu-jie  CHEN Dong-lin  LI Yu-qin  WANG Chang-wei  ZHOU Liu-cheng
Affiliation:(Air Force Engineering University,Xi’an 710038 China)
Abstract:On the basis of theoretical analysis,the surface of PMMA substrate was reconstructed via bombardment of low energy plasma and plating SiO2 interlayer before plating ITO films by magnetron sputtering.Experimental results show that the improved technology can greatly enhance the adhesion force between ITO films and substrate of PMMA,and have the optical and electrical properties meeting the application requirement.
Keywords:PMMA  ITO thin films  adhesion force  optimization
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