Affiliation: | 1. Semiconductor Research Institute, Semiconductor Research Foundation, 519-1176 Aramaki aza-Aoba, Aoba-ku, Sendai 980-0845, Japan;2. Department of Materials Science and Engineering, Graduate School of Engineering, Tohoku University, 6-6-11-1020 Aramaki aza-Aoba, Aoba-ku, Sendai 980-8579, Japan |