纳米压痕和划痕法测定 TiO2 纳米薄膜的力学性能

目的研究相同工艺条件下阳极氧化法在不同钛合金基底(TA1,TC4,TC4F136)上生成的TiO2薄膜的力学性能差异。方法采用扫描电镜结合原子力显微镜观察3种薄膜的形貌和结构,用UNHT型纳米压痕仪测试TiO2纳米薄膜的力学性能,利用纳米划痕法测试3种钛合金表面生成的TiO2薄膜与基底的结合强度及摩擦性能,用纳米压痕技术测试TiO2的显微硬度和弹性模量。结果电解液及其它电化学条件相同时,不同钛合金基底上形成的TiO2薄膜结构(管直径、管壁厚及管长度)不同。结论阳极氧化法在钛合金基底上生成的TiO2纳米薄膜的力学性能,由TiO2微观结构及其与基底的结合强度决定,微观结构和结合强度归根到底由合金中元素决定。

Nanoindenation and Nanoscratch Measurements to Determine the Mechanical Properties of TiO2 Nano Films

Objective To determine the differences in mechanical properties of TiO2 nano-film prepared by the method of anodic oxidation on different titanium alloy surfaces (TA1, TC4, TC4F136) under the same processing conditions. Methods SEM and AFM were used to observe morphology and structure of these three kinds of samples. The UNHT nanoindentor was used to test the mechanical property of TiO2 nano-film, and nano scratch was performed to determine the adhesive strength and the friction property between TiO2 nano-films on the three titanium alloy surfaces and the substrate. Nanoindentation was used to test microhardness and elastic modulus of TiO2 nano-films. Results It showed that the structure (tube diameter, wall thickness and length) of TiO2 films formed on different titanium alloy substrate differed from each other although they were prepared in the same electrolyte and other electrochemical conditions. Conclusion The mechanical properties of TiO2 nano-films on titanium alloy substrates which are prepared by anodic oxidation depend on the micromorphology of TiO2 and its adhesive strength with the substrates which ultimately depend on the difference of elementary composition of those alloys.