放置方向和沉积时间对 Ti 大颗粒分布状态的影响

目的研究基体表面和靶表面不同放置方向以及沉积时间对Ti大颗粒形貌和分布规律的影响。方法利用电弧离子镀方法在基体上制备TiN薄膜,采用扫描电子显微镜观察TiN薄膜的表面形貌,利用ImageJ图像软件对TiN薄膜表面中Ti大颗粒的数目和尺寸进行分析。结果靶基间距保持25 cm,当基体表面与靶表面垂直放置时,薄膜表面的大颗粒数目和所占面积比比平行放置时要少,同时出现了典型的长条状大颗粒;随着沉积时间从5 min增加到50 min,大颗粒数目和所占面积比出现先减小后增加的趋势。结论选择基体表面与靶表面垂直放置,沉积时间为30~40 min时,薄膜的沉积厚度和减少大颗粒缺陷可以兼顾。

Influence of Placement Orientation and Deposition Time on the Morphology and Distribution of Ti Macroparticles

Objective The effects of different placement orientation between substrate surface and target surface and the deposition time on the morphology and distribution of Ti macroparticles ( MPs) were studied. Methods TiN films were deposited on the substrate by the arc ion plating method, the surface morphology of the Ti films was observed by the Scanning electron microscopy ( SEM) method, and the amount and size of Ti MPs in the surface of TiN films were analyzed using the scientific image software ImageJ. Results When the distance between the target and the substrate was 25 cm, the amount and area fraction of MPs in the films were lower when the substrate surface and the target surface were placed perpendicularly, as compared to those when the substrate surface and the target surface were placed in parallel. Meanwhile, a typical strip shape MPs appeared. With the deposition time increasing from 5 min to 50 min, the amount and the area fraction showed a trend of first decreasing followed by increasing. Conclusion When the placement orientation was perpendicular between the substrate surface and the target surface, and the deposition time was 30 ~ 40 min, the deposition thickness of the film and the reduction of MPs could be achieved at the same time.