氮化铝表面激光金属化研究进展

综述了激光金属化的国内外发展现状，对激光金属化氮化铝表面的原理以及影响金属化效果的主要因素进行了介绍。激光金属化利用氮化铝在激光的高温下热分解产生金属铝层实现表面金属化，铝层厚度和导电性是衡量金属化效果的主要指标。影响金属化效果的因素主要有激光器的波长、激光工艺参数(能量密度、脉宽和光斑搭接率)、光斑能量分布和气体氛围，分析了各个因素的作用机理。最后针对激光金属化过程中存在的金属化导电层厚度不均匀、电阻偏大等缺陷，总结了关于激光金属化的几点优化措施。

Research Progress on Laser Metallization of AlN Surface

This article summarizes the research development in China and beyond. Firstly, it analyzes the mechanism of AlN surface laser metallization, afterwards it reports and classifies the influence of key parameters. Simply to say, the conductive aluminum layer on the AlN surface is produced by the thermal decomposition AlN into aluminum and nitrogen duo to laser induced ultrahigh temperature. The main indicators to measure the metallization effect include the thickness and conductivity of the aluminum layer. The electrical properties of the metallic layer on AlN surface are mainly determined by laser wavelength, laser operating parameters, energy distribution and ambient atmosphere. The influence mechanism of these factors is analyzed briefly. Ultimately, some optimization measures for laser metallization are summarized in view of the defects of uneven thickness and large resistance of the metallized conductive layer in the laser metallization process.