| 表面分析技术综述 |
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| 引用本文： | 朱自成.表面分析技术综述[J].表面技术,1992,21(1):5-9. |
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| 作者姓名： | 朱自成 |
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| 作者单位： | 西南技术工程研究所 |
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| 摘 要： | 介绍表面分析研究的内容和分析技术,具体论及电子探针显微分析、俄歇能谱分析、光电子能谱、二次离子质谱等。同时综述表面分析技术的现状及其发展前景。
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| 关 键 词： | 表面分析 俄歇电子能谱 光电子能谱 |
Surface Analysis Techniques |
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| Zhu Zicheng Southwest Technique & Engineering Institute.Surface Analysis Techniques[J].Surface Technology,1992,21(1):5-9. |
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| Authors: | Zhu Zicheng Southwest Technique & Engineering Institute |
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| Affiliation: | Zhu Zicheng Southwest Technique & Engineering Institute |
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| Abstract: | This paper introduces briefly the analysis techniques,electronic probe microana- lysis,Auger electron spectroscopy,optoelectron spectrescopy and secondary ion mass spectrometer etc.as well as the contents of the surface observation.At the same time,it sums up the present situation about the surface analysis and its developing foreground. |
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| Keywords: | surface analysis technique surface compositions surface structure resolution |
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