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MOCVD法制备碳-氧化铝太阳能选择吸收涂层的研究
引用本文:侯玉芝,蒋利军,王树茂,郝雷,李岩.MOCVD法制备碳-氧化铝太阳能选择吸收涂层的研究[J].表面技术,2009,38(3):10-12.
作者姓名:侯玉芝  蒋利军  王树茂  郝雷  李岩
作者单位:北京有色金属研究总院能源材料与技术研究所,北京,100088;北京有色金属研究总院能源材料与技术研究所,北京,100088;北京有色金属研究总院能源材料与技术研究所,北京,100088;北京有色金属研究总院能源材料与技术研究所,北京,100088;北京有色金属研究总院能源材料与技术研究所,北京,100088
摘    要:目前,普遍采用射频溅射制备以氧化铝为介质基体的太阳能选择吸收涂层,但射频溅射成本高、效率低.以乙酰丙酮铝为前驱体,采用金属有机化合物化学气相沉积(MOCVD)方法,在不锈钢基体上制备碳一氧化铝太阳能选择吸收涂层,大大降低了涂层成本.研究了栽气成分、沉积时间对膜层成分和吸收率的影响.结果表明:在沉积温度为600℃、载气氧含量为3%、沉积时间4h时获得了吸收率α为0.91的涂层.

关 键 词:太阳能  选择吸收涂层  MOCVD  吸收率

Study on Preparation of Carbon-alumina Solar Selective Coating by Metal Organic Chemical Vapor Deposition
HOU Yu-zhi,JIANG Li-jun,WANG Shu-mao,HAO Lei,LI Yan.Study on Preparation of Carbon-alumina Solar Selective Coating by Metal Organic Chemical Vapor Deposition[J].Surface Technology,2009,38(3):10-12.
Authors:HOU Yu-zhi  JIANG Li-jun  WANG Shu-mao  HAO Lei  LI Yan
Affiliation:HOU Yu-zhi,JIANG Li-jun,WANG Shu-mao,HAO Lei,LI Yan(Energy Materials , Technology Research Institute of General Research Institute for Non-ferrous Metals,Beijing 100088,China)
Abstract:At present,the alumina matrix for the medium solar energy selective absorbing coating widely is in common prepared by radio frequency(RF)sputtering.However,the cost of RF sputtering is high and its efficiency is low.Solar energy selective carbon-alumina coatings were prepared by metal organic chemical vapor deposition(MOCVD) on steel substrates using aluminum-acetylacetonate and greatly reduced the cost of coatings.The influence factors of component of carried gas and deposition time on the composition and ...
Keywords:MOCVD
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