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| 蓝宝石晶片机械化学研磨抛光新方法研究 | |
| 引用本文： | 王吉翠,邓乾发,周兆忠,李振,袁巨龙.蓝宝石晶片机械化学研磨抛光新方法研究[J].表面技术,2011(5):101-103. |
| 作者姓名： | 王吉翠 邓乾发 周兆忠 李振 袁巨龙 |
| 作者单位： | 1. 浙江工业大学特种装备制造与先进加工技术教育部/浙江省重点实验室,杭州,310014 2. 浙江工业大学特种装备制造与先进加工技术教育部/浙江省重点实验室,杭州310014;湖南大学机械与运载工程学院,长沙410082 3. 浙江工业大学特种装备制造与先进加工技术教育部/浙江省重点实验室,杭州310014;衢州学院,衢州324000 |
| 基金项目： | 国家自然科学基金重点项目(50535040); 2010年浙江省自然基金资助(Y1101085,Y1101095) |
| 摘 要： | 以SiO2为磨料,同时将MgF2微粉作为固相反应催化剂加入到SiO2磨料中,利用蓝宝石和SiO2之间的固相反应,通过去除生成的软质反应层的方法,对蓝宝石晶片进行机械化学研磨抛光,在获得良好的表面加工质量的同时,提高蓝宝石晶片加工效率. |
| 关 键 词： | 蓝宝石晶片 固相反应 SiO2 催化剂 MgF2 |
The Study on the Method of Mechano-chemical Polishing about the Grinding Polishing of Sapphire |
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| WANG Ji-cui,DENG Qian-fa,ZHOU Zhao-zhong,LI Zhen,YUAN Ju-long.The Study on the Method of Mechano-chemical Polishing about the Grinding Polishing of Sapphire[J].Surface Technology,2011(5):101-103. | |
| Authors: | WANG Ji-cui DENG Qian-fa ZHOU Zhao-zhong LI Zhen YUAN Ju-long |
| Affiliation: | WANG Ji-cui1,DENG Qian-fa1,2,ZHOU Zhao-zhong1,3,LI Zhen1,YUAN Ju-long1,2(1.Key Laboratory of E&M/Ministry of Education & Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China,2.College of Mechanical and Vehicle Engineering,Hunan University,Changsha 410082,3.Quzhou Collage,Quzhou 324000,China) |
| Abstract: | In order to increase the material removal rate with good surface quality,this article introduces the method that abrasive which is SiO2 removes the soft reaction layer of the solid state-reaction between the sapphire(α-Al2O3)and SiO2.At the same time,mixing the MgF2 powder as catalyst and SiO2 abrasive can have a better effect. |
| Keywords: | sapphire crystal solid state-reaction SiO2 catalyst MgF2 |
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