| 离子束轰击对多层膜摩擦学性能的影响 |
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| 引用本文： | 张伟,薛群基,张绪寿.离子束轰击对多层膜摩擦学性能的影响[J].金属学报,1997,33(11):1165-1170. |
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| 作者姓名： | 张伟 薛群基 张绪寿 |
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| 作者单位： | 中国科学院兰州化学物理研究所固体润滑开放研究实验室!兰州，730000，中国科学院兰州化学物理研究所固体润滑开放研究实验室!兰州，730000，中国科学院兰州化学物理研究所固体润滑开放研究实验室!兰州，730000 |
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| 摘 要： | 用Ｎｅ离子束混合法制务了Ｎｉ／Ｃｒ多层膜，用Ａｕｇｅｒ光电子能谱（ＡＥＳ），Ｘ射线衍射（ＸＲＤ）分析离子束混合多层膜的元素组成，分布和相结构，将其结果与简单蒸发沉积的Ｎｉ／Ｃｒ多层膜结构进行比较，同时，对多层膜（轰击与未轰击）的硬度及摩擦学性能进行测定分析比较，结果表明，离子束混合多层膜的硬度和抗磨性能与简单蒸发沉积多层膜相比都相有提高，这主要是因为Ｎｅ离子的轰击使用使多层膜更加致密及膜内的碳化铬
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| 关 键 词： | 离子束混合 多层膜 摩擦磨损 界面强化 镍 铬 |
| 收稿时间： | 1997-11-18 |
| 修稿时间： | 1997-11-18 |
THE INFLUENCE OF ION BEAM BOMBARDMENT TO THE TRIBOLOGICAL PERFORMANCE OF MULTILAYER FILM |
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| ZHANG Wei,XUE Qunji,ZHANG Xushou.THE INFLUENCE OF ION BEAM BOMBARDMENT TO THE TRIBOLOGICAL PERFORMANCE OF MULTILAYER FILM[J].Acta Metallurgica Sinica,1997,33(11):1165-1170. |
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| Authors: | ZHANG Wei XUE Qunji ZHANG Xushou |
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| Affiliation: | ZHANG Wei,XUE Qunji,ZHANG Xushou(Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,The Chinese Academy of Sciences,Lanzhou ) |
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| Abstract: | Ni/Cr multilayer film was prepared by the way of Ne ion beam mixing. The distribution of elements and phase structure in Ni/Cr multilayer film were investigated using Auger electron spectroscopy sputtering depth profiles and X-ray diffraction analysis. The microhardness and tribological properties of multilayer film were measured. The results showed that Ni/Cr ion beam mixing multilayer film had high microhardness and anti-wear property compared with that of Ni/Cr multilayer film without ion beam bombardment. The high anti-wear property of ion beam mixing Ni/Cr multilayer film was attributed to the change of microstructure of the multilayer film and the dispersed chromium carbide microcrystals moved to the interfaces of multilayer film. |
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| Keywords: | ion beam mixing Ni/Cr multilayer film friction and wear interface strengthening |
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