| 轴对称磁场对电弧离子镀TiN薄膜结构及摩擦性能的影响 |
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| 引用本文： | 肖金泉,郎文昌,赵彦辉,宫骏,孙超,闻立时.轴对称磁场对电弧离子镀TiN薄膜结构及摩擦性能的影响[J].金属学报,2011(5). |
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| 作者姓名： | 肖金泉 郎文昌 赵彦辉 宫骏 孙超 闻立时 |
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| 作者单位： | 中国科学院金属研究所材料表面工程研究部;温州职业技术学院材料成型工艺与模具技术重点实验室; |
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| 基金项目： | 国家自然科学基金资助项目50801062~~ |
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| 摘 要： | 利用轴对称磁场增强电弧离子镀工艺制备TiN薄膜,对薄膜表面大颗粒尺寸、数量及大颗粒与薄膜的面积比进行了分析统计,研究了轴对称磁场横向分量强度对薄膜表面大颗粒尺寸和数量、薄膜组织结构及摩擦性能的影响,结果表明,随着轴对称磁场横向分量强度的增加,大颗粒的尺寸和数量大幅度减少,不同尺寸大颗粒的形貌差别很大,TiN薄膜的(111)择优取向增强,薄膜的晶粒尺寸减小且分布均匀:同时,薄膜的摩擦系数及其随时间的波动减小,耐磨性增强.
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| 关 键 词： | 轴对称磁场 电弧离子镀 大颗粒 组织结构 摩擦性能 |
INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING |
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| XIAO Jinquan,LANG Wenchang,ZHAO Yanhui,GONG Jun,SUN Chao,WEN Lishi Division of Surface Engineering of Materials.INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON MICROSTRUCTURE AND FRICTION PERFORMANCE OF TiN FILM DEPOSITED BY ARC ION PLATING[J].Acta Metallurgica Sinica,2011(5). |
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| Authors: | XIAO Jinquan LANG Wenchang ZHAO Yanhui GONG Jun SUN Chao WEN Lishi Division of Surface Engineering of Materials |
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| Affiliation: | XIAO Jinquan~(1)),LANG Wenchang~(1,2)),ZHAO Yanhui~(1)),GONG Jun~(1)),SUN Chao~(1)),WEN Lishi~(1)) 1)Division of Surface Engineering of Materials,Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016 2)Key Lab of Material Processing and Mould Technology,Wenzhou Vocational & Technical College,Wenzhou 325035 |
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| Abstract: | Arc ion plating(AIP)has been widely used in the deposition of various kinds of thin solid films.In AIP process,cathode spot motion is the key factor because it affects the physical characteristics of arc plasma,the utilization of cathode materials,the ejection of macroparticles(MPs) and the quality of subsequent films.It has been found that the cathode spot can be steered by an external magnetic field,such as an axisymmetric magnetic field(AMF).In this work,a new AMF produced by using an adjustable electrom... |
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| Keywords: | axisymmetric magnetic field arc ion plating macroparticle microstructure friction performance |
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