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微组装Teflon/Si3N4多层膜的结构和微摩擦磨损性能
引用本文:王吉会,王立铎,路新春,温诗铸,李恒德.微组装Teflon/Si3N4多层膜的结构和微摩擦磨损性能[J].金属学报,1998,34(6):655-660.
作者姓名:王吉会  王立铎  路新春  温诗铸  李恒德
作者单位:[1]清华大学摩擦学国家重点实验室 [2]香港科技大学化学系
基金项目:国家自然科学基金!5975032,清华大学磨擦学国家重点实验室开放基金,中国博士后基金,国防科工委微机理研究专项青年基金
摘    要:利用离子束增强交替溅射聚四氟乙烯和氮化硅靶的方法制备出微组装的Teflon/Si3N4多层膜,并通过PHI-5300,FT-IR2000,XRD和AFM/FFM等测定了多层膜的结构,力学性能和微观摩擦磨损性能。

关 键 词:聚四氟乙烯  多层膜  结构  微观  摩擦磨损
收稿时间:1998-06-18
修稿时间:1998-06-18

STRUCTURE AND MICROTRIBOLOGICAL BEHAVIOR OF TEFLON/ Si_3N_4 MICRO-ASSEMBLING FILM
WANC Jihui,WANG Liduo,LU Xinchun,WEN Shizhu,LI HengdeCoerespondent: LU Xinchun,associate professor Tel: -,Fax. ,E-mail: xcluntl pim tsinghua edu cn.STRUCTURE AND MICROTRIBOLOGICAL BEHAVIOR OF TEFLON/ Si_3N_4 MICRO-ASSEMBLING FILM[J].Acta Metallurgica Sinica,1998,34(6):655-660.
Authors:WANC Jihui  WANG Liduo  LU Xinchun  WEN Shizhu  LI HengdeCoerespondent: LU Xinchun  associate professor Tel: -  Fax  E-mail: xcluntl pim tsinghua edu cn
Affiliation:WANC Jihui,WANG Liduo,LU Xinchun,WEN Shizhu,LI Hengde( State Key Laboratory of Tribology,Tsinghua University,Beijing )( Department of Chemistry,Hong Kong University of Science and Technology,Hong Kong)Coerespondent: LU Xinchun,associate professor Tel: ()-,Fax. (),E-mail: xcluntl pim tsinghua edu cn
Abstract:Micro-assembling Teflon/Si3N4 multi--farer film was synthesized by ion beam alternating sputtering Teflon and Si3N4 ceramic targets. The structure, mechanical and ndcrotribological properties were studied by PHI--5300, FT--IR2000, Xos and atolinc force and frictioll force microscOPe. The results show that the multilayer is consist of crystalline Teflon and amorphous St3N4. The hardness of the multilayer is less than that of St3N4; but the toughness of Teflon/SisN' is greatly approved. This Teflon/Si3N4 multilayer has low friction coefficient and high wear resistance. The friction force of Tellon/ St3N4 film is linear with the load in nano--scale.The worn track will be formed in Teflon film when the load is greater than 70 uN.Keywrods: Teflon, multilayer film, structure, structure ,microtribology
Keywords:Teflon  multilayer film  structure  structure  microtribology  
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