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GIANT MAGNETO-IMPEDANCE OF PATTERNED FeSiB/Cu/FeSiB TRI-LAYER FILMS
作者姓名:X.H. Mao  Y. Zhou  M.S. Wu and B.C. Cai Key Laboratory for Thin Film and Microfabrication of Ministry of Education  Research Institute of Micro/ Nanometer Science and Technology  Shanghai Jiaotong University  Shanghai  China
作者单位:X.H. Mao,Y. Zhou,M.S. Wu and B.C. Cai Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Research Institute of Micro/ Nanometer Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China
摘    要:Sensitive magnetic field sensor with good performances can be fabricated utilizing the giant magneto-impedance (GMI) effect of soft magnetic multi-layer thin films. The transverse and longitudinal GMI effect in patterned FeSiB/Cu/FeSiB tri-layer films with the change of external magnetic field and frequency were studied at the same time. The change of the impedance of the films with the external magnetic fieldand frequency was shown. Comparing the longitudinal and transverse effect, the transverse effect has a larger linear range from zero magnetic field to a quite large magnetic field at all frequencies, and the change still were not saturated until the external magnetic field reached 1.2×104A/m, which illustrated that the films can be utilized to detect larger magnetic fields than now presented GMI sensors.

收稿时间:2002-09-30
修稿时间:2002-11-18

GIANT MAGNETO-IMPEDANCE OF PATTERNED FeSiB/Cu/FeSiB TRI-LAYER FILMS
X.H. Mao,Y. Zhou,M.S. Wu and B.C. Cai Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Research Institute of Micro/ Nanometer Science and Technology,Shanghai Jiaotong University,Shanghai ,China.GIANT MAGNETO-IMPEDANCE OF PATTERNED FeSiB/Cu/FeSiB TRI-LAYER FILMS[J].Acta Metallurgica Sinica(English Letters),2003,16(5):327-331.
Authors:XHMao  YZhou  MSWu  BCCai
Affiliation:Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
Abstract:Sensitive magnetic field sensor with good performances can be fabricated utilizing the giant magneto-impedance (GMI) effect of soft magnetic multi-layer thin films. The transverse and longitudinal GMI effect in patterned FeSiB/Cu/FeSiB tri-layer films with the change of external magnetic field and frequency were studied at the same time. The change of the impedance of the films with the external magnetic fieldand frequency was shown. Comparing the longitudinal and transverse effect, the transverse effect has a larger linear range from zero magnetic field to a quite large magnetic field at all frequencies, and the change still were not saturated until the external magnetic field reached 1.2×104A/m, which illustrated that the films can be utilized to detect larger magnetic fields than now presented GMI sensors.
Keywords:giant magneto-impedance effect  FeSiB/Cu/FeSiB films  tri- layer films
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