| 单晶硅的纳米硬度测试分析 |
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| 引用本文： | 于峰,史立秋,王涛.单晶硅的纳米硬度测试分析[J].金属热处理,2005,30(8):88-91. |
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| 作者姓名： | 于峰 史立秋 王涛 |
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| 作者单位： | 1. 佳木斯大学,材料科学与工程学院,黑龙江,佳木斯,154007
2. 佳木斯大学,机械工程学院,黑龙江,佳木斯,154007 |
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| 摘 要： | 介绍了测量硬度的几种方法，分析了纳米压痕硬度测量的基本原理。用美国原位纳米力学测试系统中的TriboIndenter对单晶硅进行了试验研究。试验结果表明，由于尺寸效应纳米硬度值随着载荷的增大而逐渐减小，纳米级的压痕试验得到的单晶硅的硬度值要高于其他传统方法测得的宏观硬度值。
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| 关 键 词： | 纳米压痕 纳米硬度 弹性模量 |
| 文章编号： | 0254-6051（2005）08-0088-04 |
| 收稿时间： | 2005-05-08 |
| 修稿时间： | 2005-05-08 |
Nano-hardness Test Analysis on Single-crystal Silicon |
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| YU Feng,SHI Li-qiu,WANG Tao.Nano-hardness Test Analysis on Single-crystal Silicon[J].Heat Treatment of Metals,2005,30(8):88-91. |
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| Authors: | YU Feng SHI Li-qiu WANG Tao |
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| Affiliation: | 1. College of Material Science and Engineering; 2. College of Mechanical Engineering, Jiamusi University, Jiamusi Heilongjiang 154007, China |
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| Abstract: | Some measurements for hardness test were introduced, and the principle of the nano-hardness test was analyzed. Some nano-hardness tests were carried out on single crystal silicon with the TrihoIndenter in the nano-scale mechanical property test system. The results show that the nano-hardness is gradually reduced with the increase of load due to the size effect. The hardness of single crystal silicon in nano-scale is higher than that in macro-scale by the conventional tests. |
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| Keywords: | nano-indentation nano-hardness elastic modulus |
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