| 类金刚石碳膜的研究进展 |
| |
| 引用本文： | 江功武,于翔,王成彪.类金刚石碳膜的研究进展[J].金属热处理,2003,28(11):1-6. |
| |
| 作者姓名： | 江功武 于翔 王成彪 |
| |
| 作者单位： | 中国地质大学(北京)工程技术学院国家科学钻探实验室,北京,100083 |
| |
| 摘 要： | 从类金刚石碳膜作为耐磨薄膜的角度出发，综述了近年来类金刚石碳膜(DLC)结构、沉积技术、沉积机理和性能方面的相关研究进展。介绍了DLC的相结构、过滤阴极真空弧(FCVA)、类金刚石碳膜的沉积机理及主要工艺影响因素，同时指出了存在的问题及研究发展趋势。
|
| 关 键 词： | 相结构 过滤阴极真空弧（FCVA） sp^3和氢含量 发展趋势 |
| 文章编号： | 0254-6051(2003)11-0001-06 |
| 修稿时间： | 2003年4月18日 |
Research Progress of Diamond-like Carbon Films |
| |
| JIANG Gong-wu,YU Xiang,WANG Cheng-biao.Research Progress of Diamond-like Carbon Films[J].Heat Treatment of Metals,2003,28(11):1-6. |
| |
| Authors: | JIANG Gong-wu YU Xiang WANG Cheng-biao |
| |
| Abstract: | With consideration of the tribological behaviors of Diamond-like Carbon Films (DLC),the related research progress of the structures,deposition process,deposition mechanisms and performances of Diamond-like Carbon Films in recent years was reviewed.For the film component and structure respect,DLC phase structure was introduced;for the deposition process,the filtered cathodic vacuum arc (FCVA) was introduced and DLC deposition mechanism was illuminated;for the performance aspect,the main process parameters were discussed;finally,the further study tendency was pointed out. |
| |
| Keywords: | phase structure filtered cathodic vacuum arc (FCVA) sp~3 and hydrogen content development tendency |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
