光催化二氧化钛薄膜的制备工艺研究进展

评述了制备二氧化钛薄膜的液相法、气相法和电化学法3大类方法的优缺点，以及3大类方法所包含的溶胶-凝胶、微乳液、磁控溅射、物理气相沉积、化学气相沉积、阳极氧化和微弧氧化等方法制备二氧化钛薄膜的工艺步骤、特点及研究进展。文章最后指出，液相法由于自身存在的优点，仍将是今后二氧化钛薄膜制备和研究的重点；而光催化性能更好的掺杂二氧化钛，其研究重点是探讨掺杂方式、制备方法和优化配比等。

Progress on Preparation of Photocatalytic TiO2 Thin Films

The advantages and shorts of three major process for preparing titania membrane,i.e. liquid,vapor deposition,and electrochemical process,were reviewed,and the operations,distinguishing feature,and research progress for preparing titania membrane by sol-gel,microemulsion,magnetronsputtering,PVD,CVD,andodic oxidation and micro-arc oxidation etc. were discussed in detail. Finally,the article indicates that the liquid deposition will still be the key process for preparing titania membrane in the future,and the research emphasis for high performance photocatalyst TiO2 membrane will be doping-technique,preparation process,and optimum proportion of composition.