| 基于NS-DSMC耦合方法与Langmuir探针诊断的射频等离子体氧化过程中等离子体分布 |
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| 引用本文： | 刘万锁,王志宝,王庆,蔺增.基于NS-DSMC耦合方法与Langmuir探针诊断的射频等离子体氧化过程中等离子体分布[J].稀有金属材料与工程,2024,53(4):988-993. |
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| 作者姓名： | 刘万锁 王志宝 王庆 蔺增 |
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| 作者单位： | 东北大学 机械工程及自动化学院，辽宁 沈阳 110819,NeuMat(泰安)表面技术有限公司，山东 泰安 250111;泰安真空表面工程工业技术研究院，山东 泰安 250111,东北大学 机械工程及自动化学院，辽宁 沈阳 110819,东北大学 机械工程及自动化学院，辽宁 沈阳 110819 |
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| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目），中国科学院WEGO研究发展计划，中央高校基本科研业务费 |
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| 摘 要： | 采用Navier-Stokes方程和直接模拟蒙特卡罗方法相结合的方式模拟了反应腔内的气体流动，并结合Langmuir探针检测设备分析了气体流速与等离子体密度的关系。结果表明，流体均匀性对等离子体的均匀性有显著影响。在6.5 Pa的压力下，等离子体密度和流速呈正相关，与在大气压下的实验结果一致，说明提高流体均匀性可以提高等离子体的氧化均匀性。
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| 关 键 词： | 等离子体氧化 等离子体诊断 NS-DSMC方法 Langmuir探针 等离子体均匀性 |
| 收稿时间： | 2023/8/9 0:00:00 |
| 修稿时间： | 2023/10/9 0:00:00 |
Plasma Distribution in RF Plasma Oxidation Process Based on NS-DSMC Hybrid Method and Langmuir Probe Diagnostic |
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| Liu Wansuo,Wang Zhibao,Wang Qing and Lin Zeng.Plasma Distribution in RF Plasma Oxidation Process Based on NS-DSMC Hybrid Method and Langmuir Probe Diagnostic[J].Rare Metal Materials and Engineering,2024,53(4):988-993. |
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| Authors: | Liu Wansuo Wang Zhibao Wang Qing and Lin Zeng |
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| Affiliation: | School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China,NeuMat (Taian) Surface Technology Co., Ltd, Taian 250111, China;Taian Industrial Technology Research Institute of Vacuum Surface Engineering, Taian 250111, China,School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China,School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China |
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| Abstract: | The combined method of Navier-Stokes equation and direction simulation Monte-Carlo method was used to simulate the flow in the reaction chamber, and the relationship between gas flow velocity and plasma density was analyzed by the Langmuir probe detection equipment. Results show that the flow uniformity can significantly impact the plasma uniformity. Under the pressure of 6.5 Pa, the plasma density and flow velocity show a positive correlation, which is consistent with the experiment results in atmosphere pressure. This research verifies that improving the flow uniformity can enhance the plasma oxidation uniformity. |
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| Keywords: | plasma oxidation plasma diagnosis NS-DSMC method Langmuir probe plasma uniformity |
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