| 磁控溅射沉积银薄膜/涂层的研究进展 |
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| 引用本文： | 宁哲达,王一晴,陈天天,谭志龙,闻明.磁控溅射沉积银薄膜/涂层的研究进展[J].稀有金属材料与工程,2022,51(12):4773-4782. |
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| 作者姓名： | 宁哲达 王一晴 陈天天 谭志龙 闻明 |
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| 作者单位： | 昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室,昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室,昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室,昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室,昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室 |
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| 基金项目： | 云南省国际合作计划项目(2014IA037)、云南省创新团队项目(2019HC024)。云南省科技厅科研院所技术开发研究专项 (2018DC004) |
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| 摘 要： | 银薄膜/涂层是一种在高新技术领域极具潜力的新材料,近年来在现代工业中得到了广泛的应用。采用磁控溅射制备的银薄膜/涂层具有优异的附着力,通过选择相应的沉积参数可以实现对银薄膜/涂层微观结构及性能的调控。本文综述了磁控溅射沉积银薄膜/涂层的主要制备工艺,评述了银薄膜/涂层在其主要应用领域内的研究进展,并对其未来的发展进行了展望。
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| 关 键 词： | 磁控溅射 银薄膜/涂层 显微结构 应用 |
| 收稿时间： | 2022/4/11 0:00:00 |
| 修稿时间： | 2022/6/15 0:00:00 |
Research progress of silver films / coatings deposited by magnetron sputtering |
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| Ning Zhed,Wang Yiqing,Chen Tiantian,Tan Zhilong and Wen Ming.Research progress of silver films / coatings deposited by magnetron sputtering[J].Rare Metal Materials and Engineering,2022,51(12):4773-4782. |
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| Authors: | Ning Zhed Wang Yiqing Chen Tiantian Tan Zhilong and Wen Ming |
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| Affiliation: | State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals,State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals,State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals,State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals,State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals |
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| Abstract: | Silver films / coatings is a kind of new material with great potential in the field of high and new technology, and has been extensively used in modern industry in recent years.SThe silver thin films/coatings prepared by magnetron sputtering have excellent adhesion. The microstructure and properties adjustment of silver thin films/coatings can be achieved by selecting appropriate deposition parameters.SIn this paper, the main preparation methods of silver thin films/coatings deposited by magnetron sputtering are summarized the research progress of silver thin films/coatings in its main application fields is reviewed, and the future development of silver thin films is prospected. |
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| Keywords: | Magnetron sputtering Silver film /coating Microstructure Application |
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