| 钛掺杂无氢类金刚石薄膜疏水性能研究 |
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| 引用本文： | 张 林,林国强,马国佳,魏科科,段仲伟. 钛掺杂无氢类金刚石薄膜疏水性能研究[J]. 稀有金属材料与工程, 2013, 42(10): 2123-2126 |
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| 作者姓名： | 张 林 林国强 马国佳 魏科科 段仲伟 |
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| 作者单位： | 大连理工大学 三束材料改性教育部重点实验室，辽宁 大连 116024 |
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| 基金项目： | 浙江省科技厅创新团队项目 (2010R50016)；国家自然科学基金 (51001092)；国家质检公益性行业科研专项 (201210107)；江苏省科技计划项目 (BE2011114) |
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| 摘 要： | 采用MEVVA离子源复合磁控溅射沉积系统，在钛合金Ti6Al4V基体上制备Ti掺杂DLC薄膜，研究Ti掺杂对DLC薄膜疏水性能的影响。通过X射线能谱仪（EDS）、X射线光电子谱（XPS）、原子力显微镜（AFM）分别对薄膜的组分、化学键以及表面形貌进行分析；通过测量静态接触角分析薄膜的润湿性并计算薄膜的表面能。结果表明：Ti掺杂DLC膜明显提高疏水性能，水接触角最高达到105°。薄膜中sp2C杂化键组分增加以及表面形成Ti-O键，是导致薄膜表面能降低的重要因素
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| 关 键 词： | 类金刚石膜；掺杂；接触角；表面能 |
| 收稿时间： | 2012-09-01 |
Hydrophobic Property of Hydrogen-Free Ti-DLC Films |
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| Zhang Lin,Lin Guoqiang,Ma Guoji,Wei Keke and Duan Zhongwei. Hydrophobic Property of Hydrogen-Free Ti-DLC Films[J]. Rare Metal Materials and Engineering, 2013, 42(10): 2123-2126 |
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| Authors: | Zhang Lin Lin Guoqiang Ma Guoji Wei Keke Duan Zhongwei |
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| Affiliation: | Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education,Dalian University of Technology, Dalian 116024, China |
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| Abstract: | Ti-containing diamond-like carbon (Ti-DLC) films were deposited on Ti6Al4V substrate by a hybrid deposition system of MEVVA ion source and magnetron sputtering. The influence of Ti contents on the hydrophobic property of DLC films was investigated. The composition, bonding structure and surface morphology of the films were characterized by EDS, XPS and AFM, respectively. The wettability of the films was examined by the contact angle measurement. The surface energy including the dispersive and polar components was evaluated using two types of liquid with different polarity. The results show that the hydrophobicity of Ti-doped DLC films is obviously improved, whose water-contact angle increases to 105° from 68.5°. The main reason for the hydrophobicity improving may be that the surface energy of the Ti-doped DLC film is decreased by higher sp2-bonded carbon configuration and the formation of Ti-O bond |
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| Keywords: | DLC film doped contact angle surface energy |
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