电气石衬底温度对ZnO薄膜的结晶特征和光学特性的影响

利用超声雾化热解技术 (USP) 在不同温度的电气石和玻璃衬底上生长ZnO纳米片状薄膜。结构研究表明晶体为六方纤锌矿多晶结构。衬底温度越高，Raman特征峰越强，XRD结果给出（002）优势定向越明显，晶体结晶性能越好，晶粒尺寸越大。SEM图像显示片状ZnO晶体沿平行衬底方向叠加形成花状晶柱的微观形貌，沉积温度越高，晶柱宽度越大。UV-Vis表明电气石衬底上ZnO吸收峰强度高于玻璃衬底，最大吸收峰位置发生红移，高温下移动更大。

On the Temperature influence of Tourmaline Substrate: Crystalline Characteristics and Optical Properties of ZnO Thin Films

ZnO nanosheet thin films were obtained by the ultrasonic spray pyrolysis technique (USP) on tourmaline and glass substrates at different deposition temperature. Structural studies suggested that ZnO crystals were polycrystalline with hexagonal wurtzite structure. The intensity of the characteristic Raman peak, and the (002) preferential orientation, the degree of crystallinity, the grain size achieved by the XRD results were significantly increased with the elevation of the substrate temperature. SEM images showed that the ZnO nanoplates laminated in parallel to the substrate and assembled to the flower-like column morphology, ZnO nano crystals had larger lamellae sizes and wider crystalline columns at higher temperature. UV-Vis measurement confirmed the maximum absorption peak of the ZnO films on the tourmalines had more red shifts and stronger intensities than that on the glass substrates, and relatively greater wavelength shifts under higher substrate temperature were also observed.