| 基于ANSYS的微谐振器模态分析 |
| |
| 引用本文： | 郭玮玮,国蓉,王伟,霍鹏飞,王小娟.基于ANSYS的微谐振器模态分析[J].兵工自动化,2008,27(11):32-33. |
| |
| 作者姓名： | 郭玮玮 国蓉 王伟 霍鹏飞 王小娟 |
| |
| 作者单位： | 1. 西安工业大学光电工程学院,陕西,西安,710032
2. 西安机电信息研究所,陕西,西安,710065 |
| |
| 摘 要： | 为研究微谐振器在MEMS引信中的振动现象，建立系统固有频率和振型的方程。通过有限元仿真软件ANSYS对微谐振器进行模态仿真分析，包括基于分块Lanczos法的模态分析、软件仿真、结构尺寸对固有频率影响等，得到微谐振器的谐振频率和等效质量等重要参数，以及不同的结构尺寸其的影响。
|
| 关 键 词： | MEMS引信 微谐振器 谐振频率 模态分析 |
Micro-Resonator Modal Analysis Based on ANSYS |
| |
| GUO Wei-wei,GUO Rong,WANG Wei,HUO Peng-fei,WANG Xiao-juan.Micro-Resonator Modal Analysis Based on ANSYS[J].Ordnance Industry Automation,2008,27(11):32-33. |
| |
| Authors: | GUO Wei-wei GUO Rong WANG Wei HUO Peng-fei WANG Xiao-juan |
| |
| Affiliation: | GUO Wei-wei, GUO Rong, WANG Wei, HUO Peng-fei, WANG Xiao-juan(1. School of Optoelectronics Engineering, Xi＇ an University of Tchnology, Xi＇ an 710032, China; 2. Xi＇an Mechanical ＆ Electric Institute, Xi＇an 710065, China) |
| |
| Abstract: | For researching the vibrant phenomenon of the microresonator on MEMS fuse, the intrinsic frequency and vibration mode equations in the system was established. Through the FEM simulation software ANSYS to modal analysis for the microresonator that include the modal analysis based on the part Lanczos method, the software simulation, the structure dimension＇s influence on the intrinsic frequency, etc.. Acquire the important parameter and different structures measure influence the microresonator of the resonant frequency and equivalent mass. |
| |
| Keywords: | MEMS fuse Micro-resonator Resonant frequency Modal analysis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
