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基于压电陶瓷的激光谐振腔长控制技术
引用本文:谢国兵,刘卫国,高爱华.基于压电陶瓷的激光谐振腔长控制技术[J].兵工自动化,2012,31(3):75-78.
作者姓名:谢国兵  刘卫国  高爱华
作者单位:西安工业大学光电微系统研究所,西安,710032;西安工业大学光电微系统研究所,西安,710032;西安工业大学光电微系统研究所,西安,710032
摘    要:为了获得频率稳定的激光源,介绍一种利用压电陶瓷微位移控制激光谐振腔长的方法。通过D/A卡输出非等间隔控制电压序列给压电陶瓷驱动电源,使压电陶瓷产生微小形变从而控制激光谐振腔长均匀变化,使出射激光频率均匀稳定。实验结果表明:该系统可以精确有效地对激光谐振腔长进行微调节控制,定位精度可以达到nm级别。

关 键 词:激光谐振腔长  压电陶瓷  非线性校正  虚拟仪器  激光频率
收稿时间:2013/3/4 0:00:00

Laser Resonant Cavity Length Regulation Technology Based on Piezoelectric Ceramic
Xie Guobing , Liu Weiguo , Gao Aihua.Laser Resonant Cavity Length Regulation Technology Based on Piezoelectric Ceramic[J].Ordnance Industry Automation,2012,31(3):75-78.
Authors:Xie Guobing  Liu Weiguo  Gao Aihua
Affiliation:(Research institute of Micro-Optoelectronic System,Xi'an Technological University,Xi'an 710032,China)
Abstract:In order to acquire the laser source with stable frequency,introduce a method to use piezoelectric ceramic micro-displacement to regulate laser resonant cavity length.Use D/A card to output non-equidistant regulate voltage sequences to piezoelectric ceramic driving power.Then the piezoelectric ceramic shape is changed to regulate laser resonant cavity length to change averagely.The experimental results show that the length of the laser resonant cavity can be regulated accurately and the frequency of the laser is stability,high positioning accuracy with nm level.
Keywords:laser resonant cavity length  piezoelectric ceramic  nonlinear correction  virtual instrumentation  frequency of laser
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