基于MEMS VOA阵列的红外场景生成器 |
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引用本文: | 吕兴东,魏伟伟,张金英,杨晋玲,杨富华.基于MEMS VOA阵列的红外场景生成器[J].航空兵器,2016(2):38-41. |
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作者姓名: | 吕兴东 魏伟伟 张金英 杨晋玲 杨富华 |
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作者单位: | 中国科学院半导体研究所,北京,100083 |
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基金项目: | 航空科学基金项目(20130136001) |
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摘 要: | 针对动态半实物仿真系统的需求,提出了一种新颖的基于微机电系统(MEMS)技术的红外场景生成器。研究了可变光衰减器(VOA)阵列组成红外场景生成器的工作原理和器件结构,提出了新型串联双向折叠梁结构和阵列布局方案,为实现大规模阵列的红外场景生成器奠定基础。
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关 键 词: | 微机电系统 可变光衰减器 红外场景生成器 阵列 洛伦兹力 |
IR Scene Generator Based on MEMS VOA Array |
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Abstract: | A novel IR scene generator based on MEMS technology is proposed for the application of dynamic semi-physical simulation systems.The working principle and device structure of the IR scene generator composed by VOA array are investigated.The novel series of bi-directional folded beam struc-ture and its array distribution solution are proposed.This work provides the foundation for the realization of large s-cale array IR scene generator . |
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Keywords: | MEMS VOA IR scene generator array Lorentz force |
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