微弱电容信号的离散频率测试方法及其硬件电路的实现

硅微惯性器件的微弱电容信号检测一直是微机械研究领域的重要问题，其检测方法及集成电路的实现已成为制约微惯性器件发展的一个重要因素。利用频率信号抗干扰性好的特点将微弱电容信号转换成频率信号，提出了一种利用离散频率测试的方法对加速度信号进行测试，使得所测加速度可以通过各离散频率点与步长频率的倍数关系直接读出，并通过硬件电路实现了该方法，对实验结果进行了验证，与理论仿真结果很相符。

Measuring Method and Applying Circuit of Dispersed Frequency for Detecting Weak Capacitance Signal

The detecting methed of weak capacitance signal and integrative circuit are important factor of confining the development of the micro inertia devices. A way of converting the weak capacitance signal to frequency signal based on the good anti-disturbed ability of the frequency signal was introduced in this paper so that we can measure the acceleration signal through measuring the dispersed frequency, and then we can directly read out the acceleration through the times of step frequency to the dispersed frequency point. We have made it out through the hardware circuit, and validated the result of the experiment, which is consistent with the theory simulation.