Effect of Substrate Surface Roughness on Properties of Ni-Cr Alloy Thin Film |
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| Authors: | WANG Guang-hai YU Xiao-yan LI Guo-xin JIAO Qing-jie |
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| Affiliation: | [1]Changsha Electromechanical Product Research and Development Center, Changsha 410100, Hunan, China [2]State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, China） |
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| Abstract: | The effect of surface roughness of aluminum oxide (95%) substrate on the properties of Ni-Cr alloy thin film is studied.The thin films are prepared on the substrates with different roughness by using magnetron sputtering.The micro-structure,adhesive and electrical properties of the thin films were investigated by using scanning electron microscopy,scratch method and four-probe method.The burst voltage and current of the thin film transducers with different substrates were measured according to D-optimization method.The results show that the particle size,structural defect,resistivity and adhesion strength of the thin film increase with the increase of the substrate roughness.The difference among the burst time of the samples with difference substrate roughness gradually decreases with the increase of stimulation amount.The burst time is approximate to 20 μs in the charging voltage of 37 V. |
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| Keywords: | physical chemistry Ni-Cr thin film magnetron sputtering surface roughness electrical property morphology adhesion |
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