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S型MEMS平面微弹簧垂直弹性系数
引用本文:李晓杰,牛兰杰,翟蓉,殷群.S型MEMS平面微弹簧垂直弹性系数[J].探测与控制学报,2010,32(1).
作者姓名:李晓杰  牛兰杰  翟蓉  殷群
作者单位:1. 机电工程与控制国家级重点实验室,陕西,西安,710065
2. 西安机电信息研究所,陕西,西安,710065
摘    要:针对缺少"S型"平面微弹簧垂直弹性系数计算公式的问题,运用卡氏第二定律和胡克定律,推导出"S型"平面微弹簧垂直方向弹性系数计算公式。ANSYS有限元仿真表明,其相对误差小于2%,且弹簧垂直方向弹性系数随节数、弯半径以及直梁长度的增大而减小,随梁的宽度和厚度的增大而增大,分析结果为"S型"平面微弹簧的设计和优化提供一定的理论依据。

关 键 词:引信  有限元  平面微弹簧  弹性系数

Vertical Elastic Coefficient of S-form MEMS Planar Microsprings
LI Xiaojie,NIU Lanjie,ZHAI Rong,YIN Qun.Vertical Elastic Coefficient of S-form MEMS Planar Microsprings[J].Journal of Detection & Control,2010,32(1).
Authors:LI Xiaojie  NIU Lanjie  ZHAI Rong  YIN Qun
Affiliation:LI Xiaojie1,NIU Lanjie1,ZHAI Rong1,YIN Qun2(1.National Key Laboratory of Electromechanical Engineering , Control,Xi\'an 710065 China,2.Xi\'an Institute of Electromechanical Information Technology,Xi\'an 710065,China)
Abstract:Elastic coefficient formulas for S-form planar microsprings are derived respectively by using mechanical energy methods and the correctness is verified by the ANSYS simulation.The simulation result shows that their relative errors are below 2%.Formula analysis and FEA simulation indicates that vertical coefficients decrease with the increase of number,bend radius and length of the S-shaped planar microspring,and increase with the increase of the width and thickness of the microspring.Analysis results are co...
Keywords:MEMS  fuze  finite element  MEMS  planar microspring  elastic coefficient
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