MEMS万向开关加工误差分析

为了研究加工误差对万向开关响应阈值的影响，推导出了惯性开关响应阈值的计算公式，带入设计参数值计算得到的结果为391 g，对样品开关的实际响应阈值进行了冲击台跌落试验，实验结果220 g，误差－43．7％。对影响响应阈值的各项尺寸进行测量，其中S型悬臂梁的线宽B误差最明显，测量值26．4μm，小于设计许可值30μm，误差为－12％，由阈值公式，该误差引起的响应阈值误差高达－30％。最终得出结论，由于S型悬臂梁的线宽B尺寸较小，加工时容易产生较大误差，悬臂梁的刚度与线宽B的立方成正比，因此线宽B是影响开关响应阈值的主要因素。

Analysis of Fabracation Error on MEMS Om-Nidirectional Trigger

In order to study the infulence of fabracation error on MEMS omnidirectional trigger’s response threshold,we deduced the calculation formula of inertia switch response threshold.We introduced the design parameter values,and calculated and got the result 39 1 g.We measured the actual response threshold of the trigger samples through impact table drop test.The experimental result was 220 g,and the result calculated through the design values was 39 1 g,and the error between them was -43 .7%.The fabracation error of the S-shape beam ’s line width is the most obvious,and the measured value is 26.4 μm and the design value is 30 μm,and the error between them is -12%,and this error can cause-30% errors in response threshold.The conclusion is that because of the line width B’s obvious error is caused by small size and theremarkable influence of line width B on S-scale bean’s angular rigidity,the line width B is the main influence factor of omnidirectional trigger’s response threshold.