| 太阳电池用共掺杂ZnO透明导电薄膜的结构及性能 |
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| 引用本文： | 王辉,袁玉珍,刘汉法,张化福,刘云燕,刘俊成.太阳电池用共掺杂ZnO透明导电薄膜的结构及性能[J].太阳能学报,2011,32(4):476-480. |
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| 作者姓名： | 王辉 袁玉珍 刘汉法 张化福 刘云燕 刘俊成 |
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| 作者单位： | 1. 山东理工大学材料科学与工程学院,淄博,255049
2. 山东理工大学理学院,淄博,255049 |
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| 基金项目： | 山东理工大学"功能材料"创新研究团队资助项目 |
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| 摘 要： | 采用直流磁控溅射法在室温条件下制备出Al,Zr共掺杂ZnO透明导电薄膜.用XRD和SEM分析和观察了薄膜的组织结构和表面形貌,着重分析了靶基距对薄膜结构和光电性能的影响.研究结果表明,制备的Al,Zr共掺杂ZnO透明导电薄膜为具有C轴择优取向、六角纤锌矿结构的多晶薄膜.靶基距对Al,Zr共掺杂Zn0透明导电薄膜的结构和...
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| 关 键 词： | Al Zr共掺杂ZnO 透明导电薄膜 磁控溅射 太阳电池 |
CO-DOPED ZnO-BASED TRANSPARENT CONDUCTING THIN FILM USED IN SOLAR CELLS |
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| Wang Hui,Yuan Yuzhen,Liu Hanfa,Zhang Huafu,Liu Yunyan,Liu Juncheng.CO-DOPED ZnO-BASED TRANSPARENT CONDUCTING THIN FILM USED IN SOLAR CELLS[J].Acta Energiae Solaris Sinica,2011,32(4):476-480. |
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| Authors: | Wang Hui Yuan Yuzhen Liu Hanfa Zhang Huafu Liu Yunyan Liu Juncheng |
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| Affiliation: | Wang Hui1,Yuan Yuzhen2,Liu Hanfa2,Zhang Huafu2,Liu Yunyan2,Liu Juncheng1(1.School of Materials Science and Engineering,Shandong University of Technology,Zibo 255049,China,2.School of Science,China) |
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| Abstract: | Transparent conducting Al,Zr co-doped ZnO thin film were successfully prepared by DC magnetron sputtering at room temperature.XRD and SEM were used to analyze and observation the structure and surface morphology of the film.The effects of target-substrate distance on structure and optoelectronic properties of film were analyzed intersively.The experimental results show that all the films are polycrystalline with a hexagonal structure and a preferred orientation along the C-axis.The target-substrate distance... |
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| Keywords: | Al Zr co-doped ZnO transparent conducting films magnetron sputtering solar cell |
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