首页 | 本学科首页   官方微博 | 高级检索  
     

热氧化生长的SiO2钝化膜对晶体硅太阳电池性能的影响
引用本文:叶发敏,冯仕猛,郭爱娟,熊胜虎.热氧化生长的SiO2钝化膜对晶体硅太阳电池性能的影响[J].太阳能学报,2012,33(2):270-272.
作者姓名:叶发敏  冯仕猛  郭爱娟  熊胜虎
作者单位:1. 上海交通大学物理系,上海,200240
2. 上海交大泰阳绿色能源有限公司,上海,200240
摘    要:使用干氧热氧化的方法在晶体硅太阳电池表面生长SiO2钝化膜。结果表明:在780℃下生长的氧化薄膜钝化效果较好,实验检测少子寿命提高了8.3μs,以此为基础制备的太阳电池转换效率达到17.38%。实验还对氮气气氛下的氧化进行研究,发现当氮气流量为10L/min时,能强化薄膜的钝化效果,少子寿命可提高9.4μs。

关 键 词:晶体硅  太阳电池  钝化  干氧氧化  表面复合

SURFACE PASSIVATION OF THERMAL OXIDATION OF SiO2 FILM ON INFLUENCE TO PERFORMANCE OF CRYSTALLINE SILICON SOLAR CELLS
Ye Famin , Feng Shimeng , Guo Aijuan , Xiong Shenghu.SURFACE PASSIVATION OF THERMAL OXIDATION OF SiO2 FILM ON INFLUENCE TO PERFORMANCE OF CRYSTALLINE SILICON SOLAR CELLS[J].Acta Energiae Solaris Sinica,2012,33(2):270-272.
Authors:Ye Famin  Feng Shimeng  Guo Aijuan  Xiong Shenghu
Affiliation:1.Dept.of Physics,Shanghai Jiao Tong University,Shanghai 200240,China; 2.Shanghai Topsola Green Energy Co.,Ltd.,Shanghai 200240,China)
Abstract:The article focus on the research about the surface passivation by means of dry-oxygen thermal oxidation to grow a SiO2 film on the surface of crystalline silicon cells.The experimental result shows that,at the 780℃ of the oxidation temperature,the effect of passivation is best,which can raise the minority carrier lifetime as many as 8.3μs,and the efficiency of solar cells is up to 17.38%.Meanwhile,the oxidation at the atmosphere of nitrogen is studied.The result shows that,when the nitrogen flow is 10L/min,the effect of passivation is improved,which can raise the minority carrier lifetime as many as 9.4μs.
Keywords:crystalline silicon  solar cells  passivation  dry-oxygen oxidation  surface recombination
本文献已被 CNKI 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号