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Partly three-dimensional global modeling of a silicon Czochralski furnace. II. Model application: Analysis of a silicon Czochralski furnace in a transverse magnetic field |
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| Affiliation: | 1. Institut für NE-Metallurgie und Reinststoffe (INEMET), Technische Universität Bergakademie Freiberg, Germany;2. Leibniz-Institut für Kristallzüchtung (IKZ), Berlin, Germany;3. Professur für Mess- und Sensorsystemtechnik (MST), Technische Universität Dresden, Germany;1. School of Electrical and Information Engineering, Anhui University of Technology, Maanshan 243002, China;2. School of Mathematics and Physics, Anhui University of Technology, Maanshan 243002, China;3. Anhui Yixin Semiconductor Co., Ltd., Hefei 230000, China;1. Department of Applied Mechanics and Engineering, Sun Yat-Sen University, Guangzhou 510275, PR China;2. Department of Civil and Environmental Engineering, The Hong Kong Polytechnic University, Hong Kong, PR China;3. State Key Laboratory of Tropical Oceanography, South China Sea Institute of Oceanology, Chinese Academy of Sciences, Guangzhou 510301, PR China |
| Abstract: | A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski (CZ) furnace in a transverse magnetic field by a proposed 3D global model. The modeling was conducted with moderate requirements of computer resources and computation time. Most 3D features of the melt flow and thermal field in the furnace could be reproduced in the modeling. The results showed that the melt–crystal interface shape is three-dimensional and temperature difference over the circumference on the crystal and crucible sidewalls is prominent. The non-uniformity of temperature in the azimuthal direction decreases with increase in distance from the melt region. The influence of a transverse magnetic field on the flow pattern of melt and global thermal field in the furnace was analyzed. |
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