IBAD MoS2-Ta膜的电子显微与能谱分析

用透射电子显微镜与能谱技术对离子辅助沉积的ＭｏＳ２－Ｔａ膜的形态，结构，组成以及元素的化学态等进行了观察和分析。发现膜在沉积过程中已产生部分晶化，膜体出现衬底鲜明的白色”团簇”点缀的两相特殊形态。ＴＥＭ与ＸＰＳ分析确定白鬼“团簇”属析出的第二相ＴａＳ２。两区都具有（００２），（１００）和（１１０）取向，面间距与晶格常数都比ＭｏＳ２单晶增大，“白区”的参数又比膜基本略大。

Analyses of the IBAD MoS2-Ta films by TEM and energy spectrum techniques

The transmission electron microscopy and energy spectrum techniques were used to determine the morphology, structure, composition and chemical states of elements in the IBAD MoS2-Ta composite film. A partial crystallization in the deposition process of the film and a special morphology of two sharp contrary phase areas decorated by the white granule were observed and the white granule was identified as the second phase TaS2 by a combination of TEM with XPS. Two parts of the film all have (002),(100) and (110) orientations with larger d-spacings and lattice parameters, and the above parameters of the white area are larger than those of the film matrix. The experiments of immersion in deionized water and of oxidation at high temperature indicate that resistances of the film to hydrolysis and oxidation are obviously superior to those of the MoS_2 film deposited in the same condition.