| 强脉冲离子束辐照混合的RBS研究 |
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| 引用本文： | 颜莎,乐小云,赵渭江,王宇钢,薛建明.强脉冲离子束辐照混合的RBS研究[J].核技术,2006,29(2):125-128. |
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| 作者姓名： | 颜莎 乐小云 赵渭江 王宇钢 薛建明 |
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| 作者单位： | 1. 北京大学重离子物理研究所,重离子物理教育部重点实验室,北京,100871
2. 北京航空航天大学理学院物理系,北京,100083 |
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| 摘 要： | 采用卢瑟福背散射(Rutherford backscattering spectroscopy,RBS)方法对强脉冲离子束辐照Ti/Al、Al/Ti和Ni/Ti三组薄膜/衬底体系所形成的混合层进行了研究.在Ni/Ti组合中形成了厚度比离子射程大得多的、混合度较高的梯度混合层.发现熔融态混合的程度不仅取决于两材料在熔融态的表面张力的差别,而且取决于它们熔点的差异.这两个参量较接近的混合程度较好.
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| 关 键 词： | 强脉冲离子束 离子束混合 卢瑟福背散射 |
| 收稿时间： | 10 9 2005 12:00AM |
| 修稿时间： | 2005-10-09 |
Study of intense pulsed ion beam mixing with RBS |
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| YAN Sha,LE Xiaoyun,ZHAO Weijiang,WANG Yugang,XUE Jianming.Study of intense pulsed ion beam mixing with RBS[J].Nuclear Techniques,2006,29(2):125-128. |
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| Authors: | YAN Sha LE Xiaoyun ZHAO Weijiang WANG Yugang XUE Jianming |
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| Affiliation: | 1. Institute of Heavy Ion Physics, Peking University and Key Laboratory of Heavy Ion Physics, Ministry of Education, Beifing 100871; 2 Department of Applied Physics, School of Science, Beifing University of Aeronautic and Astronautic, Beijing 100083 |
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| Abstract: | The mixing effect of three different film/substrate systems, Ti/Al, Al/Ti and Ni/Ti, which were irradiated by intense pulsed ion beam, was studied with Rutherford backscattering spectroscopy (RBS). It was found that a quite well mixed layer with gradient components was formed in Ni/Ti combination. The thickness of the mixing layer is far beyond the ion range. They were mixed probably in molten state. It was also found that the mixing degree strongly related to the difference of the melting points of film/substrate couple, as well as the difference of the surface tensions. |
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| Keywords: | Intense pulsed ion beam Ion beam mixing Rutherford backscattering spectroscopy |
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