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金属铀与铝薄膜界面的俄歇电子能谱研究
引用本文:吕学超,鲜晓斌,张永彬,汪小琳. 金属铀与铝薄膜界面的俄歇电子能谱研究[J]. 原子能科学技术, 2002, 36(3): 202-204
作者姓名:吕学超  鲜晓斌  张永彬  汪小琳
作者单位:中国工程物理研究院,四川,绵阳,621900
摘    要:以磁控溅射沉积方法 ,采用循环氩离子轰击镀和未循环轰击镀工艺在金属铀上制备了铝薄膜。俄歇电子能谱分析结果表明 :循环氩离子轰击镀获得的铝薄膜和铀基体的界面扩散比未循环轰击镀的显著增强 ,且界面发生化学反应 ,生成了UAl3和Al2 O3相。

关 键 词:  铝薄膜  循环氩离子轰击镀  俄歇电子能谱
文章编号:1000-6931(2002)03-0202-03
修稿时间:2001-10-08

Study on the Interface Between Metal Uranium and Aluminum Film by Auger Electron Spectroscopy
LU Xue chao,XIAN Xiao bin,ZHANG Yong bin,WANG Xiao lin. Study on the Interface Between Metal Uranium and Aluminum Film by Auger Electron Spectroscopy[J]. Atomic Energy Science and Technology, 2002, 36(3): 202-204
Authors:LU Xue chao  XIAN Xiao bin  ZHANG Yong bin  WANG Xiao lin
Abstract:Aluminum film on uranium is prepared using magnetron sputtering with and without circulated argon ion bombardment process. Auger electron spectroscopy (AES) analysis shows there is a significant diffusion and chemical reactions take place in the interface between metal uranium and aluminum film produced with circulated argon ion bombardment process, which results in the formation of UAl 3 and Al 2O 3 phases. The interfacial role to improve the corrosion resistance of aluminum coated uranium in the atmosphere is discussed.
Keywords:uranium  aluminum film  circulated argon ion bombardment  Auger electron spectroscopy
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