| Sheet Resistance and Gas-Sensing Properties of Tin Oxide ThinFilms by Plasma Enhanced Chemical Vapor Deposition＊ |
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| 引用本文： | 刘彭义,陈俊芳,孙汪典.Sheet Resistance and Gas-Sensing Properties of Tin Oxide ThinFilms by Plasma Enhanced Chemical Vapor Deposition＊[J].等离子体科学和技术,2004,6(2):2259-2264. |
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| 作者姓名： | 刘彭义 陈俊芳 孙汪典 |
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| 作者单位： | [1]DepartmentofPhysics,JinanUniversity,Guangzhou510632,China [2]DepartmentofPhysics,SouthChinaNormalUniversity,Guangzhou510631,China |
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| 基金项目： | 广东省自然科学基金，Jinan University，Science and Technology Plan Foundation of Guangdong Province |
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| 摘 要： | Tin oxide (SnO2) thin films are prepared at different temperatures by plasmaenhanced chemical vapor deposition (PECVD). The structural characterizations of the films are investigated by various analysis techniques. X-ray diffraction patterns (XRD) show that the phase of SnO2 films are different at different deposition temperatures. The sheet resistance of the films decreases with increase of deposition temperature. X-ray photoelectron spectroscopy (XPS) shows that the SnO2 thin film is non-stoichiometric. The sheet resistance increases with increase in oxygen flow. Sb-doped SnO2 thin films are more sensitive to alcohol than carbon monoxide, and its maximum sensitivity is about 220％.
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| 关 键 词： | 二氧化锡薄膜 等离子体增强化学气相沉积法 X射线衍射 气体灵敏度 |
Sheet Resistance and Gas-Sensing Properties of Tin Oxide Thin Films by Plasma Enhanced Chemical Vapor Deposition |
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| Liu Pengyi,Chen Junfang,Sun Wangdian.Sheet Resistance and Gas-Sensing Properties of Tin Oxide Thin Films by Plasma Enhanced Chemical Vapor Deposition[J].Plasma Science & Technology,2004,6(2):2259-2264. |
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| Authors: | Liu Pengyi Chen Junfang Sun Wangdian |
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| Affiliation: | Department of Physics, Jinan University, Guangzhou 510632, China;Department of Physics, South China Normal University, Guangzhou 510631, China |
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| Abstract: | Tin oxide (SnO2) thin films are prepared at different temperatures by plasmaenhanced chemical vapor deposition (PECVD). The structural characterizations of the films are investigated by various analysis techniques. X-ray diffraction patterns (XRD) show that the phase of SnO2 films are different at different deposition temperatures. The sheet resistance of the films decreases with increase of deposition temperature. X-ray photoelectron spectroscopy (XPS) shows that the SnO2 thin film is non-stoichiometric. The sheet resistance increases with increase in oxygen flow. Sb-doped SnO2 thin films are more sensitive to alcohol than carbon monoxide, and its maximum sensitivity is about 220%. |
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| Keywords: | SnO2 thin film PECVD sheet resistance gas sensibility |
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