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One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH4 /N2 /O2 Discharge |
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| Authors: | WANG Yan LIU Xiangmei SONG Yuanhong WANG Younian |
| Affiliation: | 1 School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China 2 School of Physics,Huazhong University of Science and Technology,Wuhan 430074,China |
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