| 基于超声原子力显微镜的检测技术及应用研究 |
| |
| 引用本文： | 张改梅,陈强,何存富,鲁建东,袁玮. 基于超声原子力显微镜的检测技术及应用研究[J]. 中国印刷与包装研究, 2012, 4(3): 34-40 |
| |
| 作者姓名： | 张改梅 陈强 何存富 鲁建东 袁玮 |
| |
| 作者单位： | 1. 北京印刷学院等离子体物理与材料实验室,北京,102600
2. 北京工业大学机械工程与应用电子技术学院,北京,100124 |
| |
| 基金项目： | 国家自然科学基金——基于UAFM的纳米尺度无损检测技术及在电子封装中的应用研究(No.50775005);北京市教育委员会科技计划面上项目——基于AFAM高阻隔塑料瓶无损检测技术的研究(No.KM201110015009);北京印刷学院科技类一般项目——高频振动对接触摩擦影响的测试方法及机理研究(No.Eb201238) |
| |
| 摘 要： | 随着纳米材料和纳米技术的发展,对纳米级横向分辨率弹性测量及对次表面缺陷纳米范围成像方法的需求日趋增加,而目前传统的测试方法无法满足纳米尺度的弹性及次表面缺陷的检测.本研究提出的超声原子力显微镜技术,将原子力显微镜与超声方法相结合,即通过使原子力显微镜探针的悬臂梁或被测试件作超声振动,实现在纳米或亚微米尺度无损检测材料的弹性性能.本文基于原子力显微镜,通过激励试样底部的传感器,并采用锁相放大器调制出悬臂梁的振幅,构建了超声原子力显微镜系统,理论分析了超声原子力显微镜的悬臂梁超声振幅成像机理,通过实验得到SiOx纳米薄膜的超声幅值影像.
|
| 关 键 词： | 微悬臂 超声原子力显微镜 纳米薄膜 弹性性能 次表面缺陷 |
Detecting Technology Based on Ultrasonic Atomic Force Microscopy and Its Application |
| |
| ZHANG Gai-mei , CHEN Qiang , HE Cun-fu , LU Jian-dong , YUAN Wei. Detecting Technology Based on Ultrasonic Atomic Force Microscopy and Its Application[J]. China Printing and Packaging Study, 2012, 4(3): 34-40 |
| |
| Authors: | ZHANG Gai-mei CHEN Qiang HE Cun-fu LU Jian-dong YUAN Wei |
| |
| Affiliation: | 1 (1.Laboratory of Plasma Physics and Materials,Beijing Institute of Graphic Communication,Beijing 102600,China; 2.College of Mechanical Engineering & Applied Electronics Technology,Beijing University of Technology,Beijing 100124,China) |
| |
| Abstract: | With the development of nano-materials and nanotechnology,the elastic property measurement with the nanoscale lateral resolution and nano-scale subsurface defect technique imaging method are in good demand.Traditional measuring technologies can’t meet the demand.In this paper,the technology based on the ultrasonic atomic force microscopy was proposed,which combined the atomic force microscopy and ultrasonic.In this system,the micro-cantilever of the atomic force microscopy probe or tested sample was excited at ultrasonic frequency,and the elastic property was measured at nanosclae or sub micro-scale.The ultrasonic atomic force microscopy system was obtained after excitig the sensor under the tested sample and modulating the amplitude of cantilever using the lock-in amplifier.The ultrasonic amplitude imaging was analyzed theortically and ultrasonic amplitude imaging of SiO_x nanometer film was also obtained experimentally. |
| |
| Keywords: | Micro-cantilever Ultrasonic atomic force microscope Nano-film Elastic property Subsurface defect |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
