| CVD金刚石薄膜技术发展现状及展望（上） |
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| 引用本文： | 杨德威,栗正新,苑执中.CVD金刚石薄膜技术发展现状及展望（上）[J].珠宝科技,2012(2):44-48. |
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| 作者姓名： | 杨德威 栗正新 苑执中 |
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| 作者单位： | 河南工业大学材料科学与工程学院,郑州450001 |
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| 摘 要： | 简要描述了CVD金刚石薄膜技术的发展历程。介绍了纳米特别是超纳米金刚石膜、CVD金刚石大单晶的技术特点及其应用。超纳米金刚石膜在MEMS（微机电系统）、电化学和生物医学上的应用和CVD金刚石大单晶是当前的研究热点。简言之,金刚石的发展向着更大或者更小的方向深入进行,即＂非大即小＂。
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| 关 键 词： | 超纳米金刚石膜 CVD金刚石大单晶 综述 |
The current situation and development of CVD diamond film techniques |
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| YANG De-wei,LI Zheng-xin,YUAN Zhi-zhong.The current situation and development of CVD diamond film techniques[J].Jewellery Science and Technology,2012(2):44-48. |
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| Authors: | YANG De-wei LI Zheng-xin YUAN Zhi-zhong |
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| Affiliation: | ( College of Materials Science and Engineering, Henan University of Technology, Zhengzhou 450001, China) |
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| Abstract: | The development course of CVD diamond film technology is briefly described in this paper. The technical features and applications of nano crystalline diamond films （NCD） especially ultra-nano crystalline diamond films （UNCD） and large size CVD single crystal diamond were introduced. Applications of ultra-nano crystalline diamond films in micro-electromechanical systems （MEMS）, electrochemistry and biomedicine, and large size CVD single crystal diamond are the current research focus and hotspots. To be brief, the development of diamonds is toward the larger or smaller size diamond in the future. |
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| Keywords: | ultra-nano crystalline diamond films CVD large single crystal diamond review |
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