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耐湿性、抗干扰性高分子电阻型湿敏元件制作工艺研究
引用本文:孙良彦,邱法斌.耐湿性、抗干扰性高分子电阻型湿敏元件制作工艺研究[J].郑州轻工业学院学报(自然科学版),1994(Z1).
作者姓名:孙良彦  邱法斌
作者单位:吉林大学电子工程系
摘    要:采用一般工艺制作的湿敏元件在高湿环境中工作时,感湿膜易变形起皱,与基片脱附,大大限制了该类元件的应用范围。为此,我们改进了元件的制作工艺,通过增涂衬底膜和保护膜,基本上解决了上述问题,并且优化了元件的某些性能,延长了元件的寿命。

关 键 词:湿度传感器  衬底膜  感湿膜  保护膜  耐水性  抗干扰性

EXPLORING ON MOISTURE-PROOF AND ANTI-JAMMING RESISTENCE TYPE HUMIDITY SENSOR BASED ON POLYMER
Sun Liangyan,Qiu Fabin.EXPLORING ON MOISTURE-PROOF AND ANTI-JAMMING RESISTENCE TYPE HUMIDITY SENSOR BASED ON POLYMER[J].Journal of Zhengzhou Institute of Light Industry(Natural Science),1994(Z1).
Authors:Sun Liangyan  Qiu Fabin
Abstract:The normal humidity sensor has some disadvantages that is the sensitive film oftenchanges its form cockles and decorticates from the substrate when the sensor working inhigh humidity conditions.As a result,the application of the sensor is limited. For im-prove the making method by dipping backing film and protective coating to solve taoseproblems metioned above. At the same time , Some functions of the sensor are improvedto enlarge its applicatidn and prolong its life.
Keywords:humidity sensor  backing film  protective coating  sensitive film  water re-sitivity  antijamming
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