| 同步带传动晶圆传输机械手精度分析与补偿 |
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| 引用本文： | 刘延杰,栾玉亮,吴明月.同步带传动晶圆传输机械手精度分析与补偿[J].机械传动,2010,34(4). |
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| 作者姓名： | 刘延杰 栾玉亮 吴明月 |
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| 作者单位： | 哈尔滨工业大学,机器人技术与系统国家重点实验室,黑龙江,哈尔滨,150080 |
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| 基金项目： | 国家973项目超大规模集成电路制造装备基础问题研究(2009CB724206) |
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| 摘 要： | 分析了同步带应用于晶圆传输机器人机械手的误差产生原因,针对晶圆传输机器人高速高精度的定位要求,建立了含有同步带环节的误差模型。对各误差源进行了显著性分析,并在此基础上提出了结合几何误差迭代法和基于运动学逆解的非线性参数辨识的分步标定方法,对模型进行了误差标定及误差补偿。最后经过仿真分析和实验,有效的证明此方法显著地提高了机械手的末端定位精度。
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| 关 键 词： | 同步带传动 晶圆传输机器人 显著性分析 运动学标定 误差补偿 |
Precision Analysis and Compensation of the Wafer Handling Robot Hand with Timing-belt Transmission |
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| Liu Yanjie Luan Yuliang Wu Mingyue.Precision Analysis and Compensation of the Wafer Handling Robot Hand with Timing-belt Transmission[J].Journal of Mechanical Transmission,2010,34(4). |
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| Authors: | Liu Yanjie Luan Yuliang Wu Mingyue |
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| Affiliation: | State Key Laboratory of Robotics and System/a>;Harbin Institute of Technology/a>;Harbin 150080/a>;China |
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| Abstract: | The error causes of the wafer handling robot is analyzed by using timing-belt,and in order to improve positioning precision,the error model including timing-belt is created.On the basis of the prominency of the error' analyse,it proposed that an error multiple-step calibration and identification method combining parameter error iteration method with calibration method based on inverse kinematics equation.It also identified the geometrical structure error and the compensation.Last,the simulation and experime... |
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| Keywords: | Timing-belt transmission Wafer handling robot Prominency analysis Kinematic calibration Error compensation |
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