| 基于SPM的纳米加工技术研究 |
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| 引用本文： | 郭俊杰,冯宪琴,郭志伟.基于SPM的纳米加工技术研究[J].机电产品开发与创新,2014(1):102-104. |
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| 作者姓名： | 郭俊杰 冯宪琴 郭志伟 |
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| 作者单位： | [1]张家口职业技术学院,河北张家口075000 [2]山东省青岛天时海洋石油装备有限公司工艺设备部,山东青岛266108 |
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| 摘 要： | 扫描探针显微镜（SPM）纳米加工技术是当前非常活跃的纳米加工研究领域，其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法，以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。
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| 关 键 词： | 扫描探针显微镜 纳米加工 阳极氧化法 机械刻蚀 |
Present Situation of Nanofabrication Based on Scanning Probe Microscope |
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| GUO Jun-Jie,FENG Xian-Qin,GUO Zhi-Wei.Present Situation of Nanofabrication Based on Scanning Probe Microscope[J].Development & Innovation of Machinery & Electrical Products,2014(1):102-104. |
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| Authors: | GUO Jun-Jie FENG Xian-Qin GUO Zhi-Wei |
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| Affiliation: | 1.Department of Mechanical Engineering, ZhanNiakou Institute of Technology, Zhangjiakou Hebei 075000, China; 2.Department of Process Equipment Qingdao TSC Offshore Equipment Co.,Ltd., Qidong Shandong 266108, China) |
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| Abstract: | Nanofabrication technology based on scanning probe microscope （SPM） is an active research subject in the nanofabrication field, which has the potential to become the major technique for nanofabrication of micro/nano devices. Mechanisms of SPM-based nano- technologies, such as single atom manipulation, anode oxidation and mechanical nanofabrication, are described, and the advancement of research works in this subject is discussed. |
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| Keywords: | scanning probe microscope nanofabrication anode oxidation mechanical nanofabrication |
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