| 脉冲多弧离子镀制备类金刚石薄膜的力学特性 |
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| 引用本文： | 喻志农,沈思宽,等.脉冲多弧离子镀制备类金刚石薄膜的力学特性[J].机械科学与技术(西安),2001,20(1):100-101,105. |
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| 作者姓名： | 喻志农 沈思宽 |
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| 作者单位： | 西安交通大学电子物理与器件研究所!西安710049 |
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| 摘 要： | 利用脉冲多弧离子镀技术在硅基底上沉积类金刚石薄膜。分析了类金刚石薄膜的硬度和工艺参数的关系 ,讨论了薄膜的耐磨性和化学稳定性。
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| 关 键 词： | 脉冲多弧离子镀 类金刚石薄膜 薄膜性能 |
| 文章编号： | 1003-8728(2001)01-0100-02 |
Mechanical Properties of Diamond-like Carbon(DLC) Films Prepared by Pulse-arc Plasma Deposition |
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| YU Zhi-nong,SHEN Si-kuang,SUN Jian.Mechanical Properties of Diamond-like Carbon(DLC) Films Prepared by Pulse-arc Plasma Deposition[J].Mechanical Science and Technology,2001,20(1):100-101,105. |
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| Authors: | YU Zhi-nong SHEN Si-kuang SUN Jian |
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| Abstract: | DLC films were prepared on silicon by pulse-arc plasma deposition. The relationship between hardness of the deposited films and deposition parameters were analysed in detail. Wear resistance and chemical inertness of the deposited films are also studied. |
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| Keywords: | Pulse-arc plasma deposition DLC film properties of films |
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