| 电化学腐蚀法制备微细群圆柱 |
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| 引用本文： | 王磊,朱荻,曲宁松,王明环.电化学腐蚀法制备微细群圆柱[J].机械科学与技术(西安),2007,26(7):856-861. |
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| 作者姓名： | 王磊 朱荻 曲宁松 王明环 |
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| 作者单位： | 南京航空航天大学机电学院,南京210016 |
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| 基金项目： | 国家自然科学基金
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江苏省自然科学基金
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南京航空航天大学校科研和教改项目 |
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| 摘 要： | 提出了微细群圆柱结构电化学腐蚀加工法及其形状和尺寸控制方式。根据电化学腐蚀基本原理,通过有限元分析计算群圆柱电化学腐蚀加工过程中的电场分布,优化设计阴极形状。开展了电化学腐蚀法制备微细群圆柱结构的工艺试验,获得了良好的试验结果。
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| 关 键 词： | 微细加工 电化学腐蚀 有限元分析 微细群圆柱 阴极形状设计 |
| 文章编号： | 1003-8728（2007）07-0856-06 |
| 修稿时间： | 2006-10-18 |
Fabrication of Multiple Cylindrical Micro-pins using Electrochemical Etching Method |
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| Wang Lei,Zhu Di,Qu Ningsong,Wang Minghuan.Fabrication of Multiple Cylindrical Micro-pins using Electrochemical Etching Method[J].Mechanical Science and Technology,2007,26(7):856-861. |
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| Authors: | Wang Lei Zhu Di Qu Ningsong Wang Minghuan |
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| Affiliation: | College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016 |
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| Abstract: | We propose to machine cylindrical micro-pins using the electrochemical etching method to control their shape and dimension.Following the electrochemical etching principle,we make finite element analysis(FEA) to calculate the electric field distribution during the machining of cylindrical micro-pins with the electrochemical etching method and perform the optimal design of their cathode profiles.We also do experiments on the fabrication process of cylindrical micro-pins and the results are satisfactory. |
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| Keywords: | electrochemical etching method FEA multiple cylindrical micro-pins cathode profile design |
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