| NONLINEAR DYNAMICS OF LATERAL MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING |
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| 作者姓名： | GAO Rong WANG Xiaojing School of Mechanical Electronic Engineering and Automation Shanghai University Shanghai China WANG Min No. Institute Shanghai Academy of Spaceflight Technology Shanghai China YU Maohua XIE Mingchun School of Mechanical Electronic Engineering and Automation Shanghai University Shanghai China |
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| 作者单位： | GAO Rong WANG Xiaojing School of Mechanical Electronic Engineering and Automation，Shanghai University，Shanghai 200072，China WANG Min No. 802 Institute，Shanghai Academy of Spaceflight Technology，Shanghai 200090，China YU Maohua XIE Mingchun School of Mechanical Electronic Engineering and Automation，Shanghai University，Shanghai 200072，China |
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| 基金项目： | This project is supported by Shanghai Municipal Science and Technique Committee Foundation, China (No. 03QF14019, No. 0452nm023, No. AM0420). |
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| 摘 要： | The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme (MEMS) structures to simulate the dynamic performance.
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| 关 键 词： | 空气震荡 非线性动力学 共振器 机械力学 |
NONLINEAR DYNAMICS OF LATERAL MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING |
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| GAO Rong WANG Xiaojing School of Mechanical Electronic Engineering and Automation,Shanghai University,Shanghai ,China WANG Min No. Institute,Shanghai Academy of Spaceflight Technology,Shanghai ,China YU Maohua XIE Mingchun School of Mechanical Electronic Engineering and Automation,Shanghai University,Shanghai ,China.NONLINEAR DYNAMICS OF LATERAL MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING[J].Chinese Journal of Mechanical Engineering,2007,20(3):75-78. |
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| Authors: | GAO Rong WANG Xiaojing WANG Min YU Maohua XIE Mingchun |
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| Affiliation: | [1]School of Mechanical Electronic Engineering and Automation, Shanghai University, Shanghai 200072, China [2]No. 802 Institute,Shanghai Academy of Spaceflight Technology, Shanghai 200090, China |
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| Abstract: | The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the micro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear numerical value is more exact than linear value and the method can be applied in other micro-electro-mechanical systeme (MEMS) structures to simulate the dynamic performance. |
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| Keywords: | Air damping Nonlinear dynamics Micro-resonator Micro-electro-mechanical systems(MEMS) DAMPING VISCOUS LATERAL DYNAMICS simulate dynamic performance MEMS exact experimental data results nonlinear model peak differences numerical simulation value quite good coupled method vital |
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