微波铁氧体基片高效磨削技术研究

针对微波铁氧体基片的功能要求、材料特性和磨削工艺特点,通过大量实验分析了铁氧体基片ELID磨削与普通磨削的磨削力对比结果和形成原因,以及磨削力随工艺参数的变化规律,在此基础上,对ELID磨削效率、表面质量及磨削中出现的问题和解决途径进行了深入研究。实验结果表明,ELID磨削方法适用于微波铁氧体基片的高效磨削,保证了表面加工质量,将ELID磨削技术与平行研抛工艺结合起来,能够形成微波铁氧体基片精密高效的批量生产能力。

Study on High Efficiency Grinding Technology of Ferrite Microwave Substrates

According to the functional requirements, structural characteristics and grinding features of ferrite microwave substrates, the comparison results and cause of grinding force between ELID grinding and common grinding were analyzed by a great deal of machining experiments, and the changing rules of grinding lorce with some processing parameters were studied. On the basis of above work, the machining efficiency, surface quality,some difficulties and solving methods in ELID grinding were carefully analyzed. The experimental results indicate that ELID grinding is suitable for high efficiency grinding of ferrite microwave substrates and the machining quality can be well ensured. The capacity of manufacturing ferrite microwave substrates with mass production and high efficiency can come into being when ELID grinding and parallel lapping or polishing technology are combined.