蠕动式压电/电致伸缩微进给定位机构的研究进展

叙述蠕动式压电／电致伸缩微进给定位机的研究现状;基于仿生蠕动和压电致动惯性冲击或ｓｔｉｃｋ－ｓｌｉｐ微进给原理,许多构思巧妙的一维和多维一体的蠕动式压电／电致伸缩微进给定位机构或系统相继问世。迄今,进给刚度和推力较小,以及不连续进给运动制约了蠕动机构的实际应用,进一步的研究将推进蠕动式压电／电致伸缩微进给定位机构的实用化,使其不仅用于测量,亦能用于加工。

An Overview ofResearch on Inchworm Type ofMicro Feed and Positioning Mechanisms

The research activities on inchworm type of micro feed and positioning mechanisms are summarized in this paper. The piezoelectric/electrostrictive inchworm mechanisms possess the features to realize long stroke movement with high resolution. Many novel inchworm mechanisms and systems such as inchworm motors and XY microstages have been developed based on inchworm, impulsive and stick-slip motion. However, most of them have no enough rigidity and output thrust force. The current and further research and development trend to solve these problems and to improve the performance of inchworm mechanisms, so as to promote them into the practical applications.