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| 一种高精度原子力显微镜的设计及应用 | |
| 引用本文： | 杨学恒,陈红兵,费德国,谢超,靳平,杨惠.一种高精度原子力显微镜的设计及应用[J].中国机械工程,2004,15(21):1909-1911. |
| 作者姓名： | 杨学恒 陈红兵 费德国 谢超 靳平 杨惠 |
| 作者单位： | 1. 重庆大学数理学院,重庆,400044 2. 重庆大学科协,重庆,400044 3. 重庆工学院材料学院,重庆,400050 |
| 摘 要： | 简述了重庆大学研制的原子力显微镜(AFM)样机的工作原理和应用，重点介绍了其镜体的独特设计。该样机采用扫描隧道显微镜检测微悬臂的起伏，通过四维机械驱动和双压电陶瓷扫描，有效提高了扫描精度，扩大了扫描范围，简单适用的微悬臂使操作大大简化。给出了用该机检测到的具有代表性的4种样品的表面形貌图。 |
| 关 键 词： | 原子力显微镜 扫描隧道显微镜 镜体 微悬臂 |
| 文章编号： | 1004-132X(2004)21-1909-03 |
Design and Application of a High-resolution AFM |
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| Yang Xueheng Chen Hongbin Fei Deguo Xie Chao Jin Ping Yang Hui .Chongqing University,Chongqing,.Chongqing Institute of Technology,Chongqing.Design and Application of a High-resolution AFM[J].China Mechanical Engineering,2004,15(21):1909-1911. | |
| Authors: | Yang Xueheng Chen Hongbin Fei Deguo Xie Chao Jin Ping Yang Hui Chongqing University Chongqing Chongqing Institute of Technology Chongqing |
| Affiliation: | Yang Xueheng 1 Chen Hongbin 1 Fei Deguo 1 Xie Chao 1 Jin Ping 1 Yang Hui 21.Chongqing University,Chongqing,4000442.Chongqing Institute of Technology,Chongqing,400050 |
| Abstract: | An AFM model has been developed by Chongqing University. The principles of operation and some applications were reported briefly. The special design of the lens body was introduced in detail. This model used a STM to detect the shift of the micro-cantilever. Four motors and two PZT tubes were used to enlarge the scanning range and to enhance the resolution. A simple cantilever was used to make it easier to prepare for the scanning. Four typical images obtained with the model are given as samples. |
| Keywords: | AFM STM lens body micro-cantilever |
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