蠕动式X—Y—θ微动工作台的设计实现

提出了一种新颖的X-Y-θ微动工作台。利用单一压电元件驱动及柔性铰链机构传动获得平面上3个自由度的运动，并与电磁夹紧机构配合实现蠕动式进给，使平面工作台具有高的位移分辨率、大的工作行程和简洁的结构。工作台的核心部件柔性铰链传动机构采用对称设计，有利于运动的导向。通过力学分析，对柔性铰链机构进行了参数选择。测试了工作台的性能，柔性铰链机构刚度的实测值同理论值接近。运动速度大于10um/s，位移分辨率小于0.1um。

Design and Develepment ofan Inchworm Type of X-Y-

This paper presents a novel inchworm type of X-Y-θ microstage.With the actuation of one piezoelectric element and conveyance of flexure hinge mechanism,a three-degree-of-freedom motion is obtained.The inchworm movement can be realized by combining the motion with the operation of solenoid clamps.The X-Y-θ stage has properties of high resolution,large motion range and compact structure.The flexure hinge mechanism is the key part of the inchworm type of X-Y-θ micro stage.It is designed symmetrically so as to guide motion well.The selection of design parameters of the flexure hinge mechanism is described.And the performance of the stage is tested.The velocity is more than 10μm/s.The resolution is less than 0.1μm.