| 射频／直流磁控溅射不锈钢／Al2O3复合薄膜组织与性能研究 |
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| 引用本文： | 温伟祥,胡社军,曾鹏,吴起白,谢光荣,黄拿灿,胡显奇,盛钢,盛忠.射频／直流磁控溅射不锈钢／Al2O3复合薄膜组织与性能研究[J].新技术新工艺,2001(2):40-42. |
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| 作者姓名： | 温伟祥 胡社军 曾鹏 吴起白 谢光荣 黄拿灿 胡显奇 盛钢 盛忠 |
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| 作者单位： | 1. 广东工业大学
2. 深圳黄金屋真空科技有限公司 |
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| 基金项目： | 本项目获国家863计划(863-715-006-0190)和广东教育厅重点项目资助(9751) |
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| 摘 要： | 利用射频/直流碳控溅射法，制备了316L不锈钢/Al2O3陶瓷复合薄膜，研究了316L不锈钢/Al2O3陶瓷复合膜的组织形貌。测试了薄膜的显微硬度和耐磨性。结果表明：直流磁控溅射316L不锈钢薄膜呈柱状晶结构，主要有Fe-Cr和γ-Fe相构成，在Fe-Cr(110)晶面出现明显的择优取向，由于射频溅赈射Al2O3陶瓷的掺合，使316L不锈钢/Al2O3陶瓷复合薄膜柱状晶细化，并出现二次柱状晶，在Fe-Cr（211）晶面出现明显的掺优取向， 316L不锈钢膜硬度明显高于316L块体，掺合了Al2O3的金属/陶瓷复合薄膜耐磨性有显著的提高。
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| 关 键 词： | 射频 直流磁控溅射 不锈钢／Al2O3薄膜 组织 性能 |
Research on Microstructure
and Properties of Stainless Steel/Al2O3 Ceramic Composite Film
Prepared by RF/DC Sputtering |
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| Wen Weixiang,Hu Shejun,ZENG Peng,Wu Qibai,Xie Guangrong,Huang Nacan,Hu Xianqi,SHENG Gang,SHENG Zhong.Research on Microstructure
and Properties of Stainless Steel/Al2O3 Ceramic Composite Film
Prepared by RF/DC Sputtering[J].New Technology & New Process,2001(2):40-42. |
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| Authors: | Wen Weixiang Hu Shejun ZENG Peng Wu Qibai Xie Guangrong Huang Nacan Hu Xianqi SHENG Gang SHENG Zhong |
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| Abstract: | In this paper,the 316L stainless steel /Al2O3 ceramic composite film was prepared by RF/DC sputtering,Microstructure and properties of 316L stainless steel/Al2O3 ceramic composite film were investigated.The results showed that the cture column crystal microstru of the 316L stainless steel prepared by magnetron sputtering was formed with Fe-Cr phase and γ-Fe phase,and(110) orientation of Fe-Cr phase had priority.The phase orientation of 316L stainless steal film with trace of Al2O3 ceramic addition turned to (211) orientation,while wear resistance improved greatly,but the hardness slightly. |
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