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一种新的表面形貌检测方法
引用本文:石心余,周仲荣.一种新的表面形貌检测方法[J].润滑与密封,2002(3):77-79.
作者姓名:石心余  周仲荣
作者单位:西南交通大学摩擦学研究所,成都,610031
摘    要:共焦激光扫描显微镜是近年来发展起来的一种新型显微镜。本文介绍了日本奥林巴斯公司研制OLS1100型共焦激光扫描显微镜性能特点,并着重介绍了利用其独有的纵向分辨能力和高的平面分辨率,在对微动磨损、显微划痕以及进行表面形貌观察和参数检测的应用。

关 键 词:共焦激光扫描显微镜  微动磨损  显微划痕  表面形貌

A New Method of Measuring Surface Texture
Shi Xinyu Zhou Zhongrong.A New Method of Measuring Surface Texture[J].Lubrication Engineering,2002(3):77-79.
Authors:Shi Xinyu Zhou Zhongrong
Abstract:Confocal laser scanning microscope (CLSM) is a new type microscope which is developed in recend years. This paper introduces its imaging principle and characteristic of OLS1100 CLSM and specially introduces some applications how taking advantage of lengthways and high plane resolution of CLSM and measuring the fretting wear, micro-nick and surface texture parameters.
Keywords:Confocal Laser Scanning Microscope Fretting Wear Micro-nick Surface Texture
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