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| 基于机器视觉的光学元件表面洁净度检测仪研制 | |
| 引用本文： | 楚红雨,谢志江,邵延华,米增真,刘琴.基于机器视觉的光学元件表面洁净度检测仪研制[J].现代科学仪器,2010(3):17-20. |
| 作者姓名： | 楚红雨 谢志江 邵延华 米增真 刘琴 |
| 作者单位： | 1. 重庆大学机械传动国家重点实验室,重庆,400030;西南科技大学信息工程学院,四川绵阳,621010 2. 重庆大学机械传动国家重点实验室,重庆,400030 3. 西南科技大学信息工程学院,四川绵阳,621010 |
| 基金项目： | 国家自然科学基金委员会与中国工程物理研究院联合基金 |
| 摘 要： | 针对SG-III精密光学元件表面洁净度检测特点,提出了基于机器视觉的检测方案。设计了三维电控平台和夹持架,选用步进电机和光栅尺实现闭环高精度控制,采用线阵CCD作为图像采集设备,选用卤素灯作为光源,利用图像处理技术得到污染物的特征参数。对340mm*340mm的光学元件测试表明,检测仪能在11分钟内完成单面扫描和分析,识别15μm以上的污染物,大大提高了检测效率。该技术可应用于多种精密表面检测项目。 |
| 关 键 词： | 光学元件 洁净度检测 线阵CCD 机器视觉 |
Development of Surface-cleanliness Inspection Instrument for Optical Element Based on Machine Vision |
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| Chu Hongyu,Xie Zhijiang,Shao Yanhua,Mi Zengzhen,Liu Qin.Development of Surface-cleanliness Inspection Instrument for Optical Element Based on Machine Vision[J].Modern Scientific Instruments,2010(3):17-20. | |
| Authors: | Chu Hongyu Xie Zhijiang Shao Yanhua Mi Zengzhen Liu Qin |
| Affiliation: | 1State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing, 400030,China;2College of Information Engineering, Southwest University of Science and Technology,Mianyang of Sichuan province, 621010, China) |
| Abstract: | Aiming at characters of ultra-smooth optical surface for SG-III, the paper presents an inspection scheme based on machine vision. Three-dimensional control platform and clamp were designed. It chose step motors and grating to implement high-precision control, used linear CCD as the image acquisition, adopted halogen lamp as light source and employed image processing technology to get the characteristic parameters. Experiment of optical element with size 340mm＊340mm showed that the instrument can complete the single face scan and analysis in 11 minutes. It can recognize 15μm contamination and greatly improve the examine effi ciency. The techniques can be applied to other precise surface inspections. |
| Keywords: | Optical Element Cleanliness Inspection Linear CCD Machine Vision |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |